Product Center
Nine product categories covering a complete solution from micro-scale observation to non-destructive testing.
8/12-inch wafer inspection system
The AWL812 is a 12-inch wafer inspection system designed for automatic loading of 12-inch wafers (with an optional 8-inch compatibility package). It features a secure and reliable EFEM, including a LoadPort, Aligner, and Robot. The fully Chinese interface is paired with advanced optical imaging to enable macro and micro-level wafer inspection and verification. An efficient data processing system facilitates defect detection and statistical analysis. Compatible with FOUP, FOSB, and Open Cassette formats, the system supports both 200mm and 300mm wafers.
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6/8-inch wafer inspection system
The AWL series wafer inspection system combines stability and safety to reliably transport wafers, making it ideal for front-end to back-end process inspections. The AWL068 model supports 6-8-inch (150mm/200mm) wafers and accommodates Open Cassette/SMIF Pod carriers. Equipped with the SOPTOP MX68R metallographic microscope featuring an infinite chromatic correction optical system, it offers magnification of 50X-1000X and supports Brightfield, Darkfield, Polarized, and DIC observation modes.
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4/6-inch wafer inspection system
The AWL series wafer inspection system combines stability and safety to reliably transport wafers, making it ideal for front-end to back-end process inspections. The AWL046 model supports 4-6-inch (100mm/150mm) wafers and accommodates Open Cassette/SMIF Pod carriers. Equipped with the SOPTOP MX68R metallographic microscope featuring an infinite chromatic correction optical system, it offers magnification of 50X-1000X and supports Brightfield, Darkfield, Polarized, and DIC observation modes.
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